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Horizontal CVD Furnace (Carbon)

Horizontal CVD Furnace (Carbon)
Product Description

Description

Horizontal CVD furnace (Carbon) is applied for composite material CVD that used hydrocarbon gas (like C3H8) as carbon sources, which works on CVD and CVI treatment for carbon materials. 

Technical Features

  • The furnace working zone size can be reach 2.5m x 2.5m x 5m, which can satisfy super size part CVD treatment.
  • Horizontal ‚vacuum carbon furnace adopts multiple temperature control zones with great temperature uniformity.
  • Special designed deposition chamber achieves good sealing effect and strong antipollution ability. 
  • Multiple deposition channels assures flow field uniformity, non-deposition dead corner and great deposition surface.
  • Tar, solid powder and organic gases are treated effectively during the deposition process.


Optional Configuration of Horizontal CVD Furnace

  • Furnace door: manual tight / auto lock-ring tight, Manual tight/Auto lock-ring tight
  • Furnace vessel: All carbon steel/Inner layer stainless steel/Total stainless steel
  • Furnace hot zone: Soft carbon felt/Soft graphite felt/Hard composite felt /CFC
  • Heating element and muffle: Isostatic press graphite/Press high purity, high strength and high density graphite/ fine size graphite
  • Process gas system: Volume/Mass flow-meter, Manual valve/Auto valve, Foreign brand/Chinese brand
  • Vacuum pump and gauge: Foreign brand/Chinese brand
  • HMI: Simulation screen/Touch screen/Industrial personal computer
  • PLC: OMRON/Siemens
  • Temperature controller: SHIMADEN/EUROTHERM
  • Thermocouple: C type, S type, K type, N type
  • Recorder: Paperless recorder/paper recorder, Foreign brand/Chinese brand
  • Electric components: CHINT/Schneider/Siemens
  • Load truck: roller type /Fork type/Folded long distance driving type


Specifications of Horizontal CVD Furnace


Spec\Model

HCVD -060609-C

HCVD -080812-C

HCVD -101015-C

HCVD -121225-C

HCVD -151530-C

Working Zone Size (W × H × L) (mm)

Φ600 × 600 × 900

Φ800 × 800 × 1200

Φ1000 × 1000 × 1500

Φ1200 × 200 × 2500

Φ1500 × 1500 × 3000

Max. Temperature (°C)

1500

1500

1500

1500

1500

Temperature Uniformity (°C)

±7.5

±7.5

±7.5

±10

±10

Ultimate Vacuum (Pa)

50

50

50

50

50

Pressure Increase Rate (Pa/h)

0.67

0.67

0.67

0.67

0.67

The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements.


Contact Us

ACME Technology park, MuYun Industrial Zone, Economic Development Zone, Changsha, Hunan, 410118, China
Phone :86-731-82961396